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Considerations on the proposed linear theory of surface measurement for coherence scanning interferometers

Henning, A. J.; Giusca, Claudiu-Laurentiu (Optical Society of America, 2017-02-22)

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Author
- Giusca, Claudiu-Laurentiu (1)
- Henning, A. J. (1)
Subject
- (110.4850) Optical transfer functions (1)
- (120.0120) Instrumentation (1)
- (120.3180) Interferometry (1)
- (120.3940) Metrology (1)
- (180.6900) Three-dimensional microscopy (1)
- (240.6700) Surfaces (1)
- and metrology (1)
- measurement (1)
- ... View More
Date Issued
- 2017 (1)