Jiang, Hong Wen; Kirby, Paul B.; Zhang, Qi
(International Society for Optical Engineering - SPIE, 2003)
A processing scheme for fabricating Pb(ZrxTi1-x)O3 thin film actuated silicon cantilevers using silicon-on-insulator
wafers is described. Such piezoelectrically actuated cantilevers are being investigated for RF microswitches. ...