dc.contributor.author |
Duval, Fabrice F. C. |
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dc.contributor.author |
Wilson, Stephen A. |
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dc.contributor.author |
Ensell, Graham |
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dc.contributor.author |
Evanno, Nicolas M. P. |
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dc.contributor.author |
Cain, Markys G. |
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dc.contributor.author |
Whatmore, Roger W. |
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dc.date.accessioned |
2007-09-03T11:45:37Z |
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dc.date.available |
2007-09-03T11:45:37Z |
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dc.date.issued |
2007-01-08 |
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dc.identifier.citation |
Duval FFC, Wilson SA, Ensell G, et al., (2007) Characterisation of PZT thin film micro-actuators using a silicon micro-force sensor. Sensors and Actuators A: Physical, Volume 133, Issue 1, January 2007, pp 35-44 |
en |
dc.identifier.issn |
0924-4247 |
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dc.identifier.uri |
https://doi.org/10.1016/j.sna.2006.03.035 |
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dc.identifier.uri |
http://hdl.handle.net/1826/1854 |
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dc.description.abstract |
This paper reports on the measurements of displacement and blocking force of piezoelectric micro-cantilevers. The free displacement was studied using a surface profiler and a laser vibrometer. The experimental data were compared with an analytical model which showed that the PZT thin film has a Young's modulus of 110 GPa and a piezoelectric coefficient d31,f of 30 pC/N. The blocking force was investigated by means of a micro-machined silicon force sensor based on the silicon piezoresistive effect. The generated force was detected by measuring a change in voltage within a piezoresistors bridge. The sensor was calibrated using a commercial nano-indenter as a force and displacement standard. Application of the method showed that a 700 μm long micro-cantilever showed a maximum displacement of 800 nm and a blocking force of 0.1 mN at an actuation voltage of 5 V, within experimental error of the theoretical predictions based on the known piezoelectric and elastic properties of the PZT film. |
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dc.format.extent |
186234 bytes |
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dc.format.mimetype |
application/pdf |
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dc.language.iso |
en |
en |
dc.publisher |
Elsevier |
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dc.subject |
PZT |
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dc.subject |
Cantilevers |
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dc.subject |
Vibrometry |
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dc.subject |
Force sensors |
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dc.subject |
Blocking force |
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dc.title |
Characterisation of PZT thin film micro-actuators using a silicon micro-force sensor |
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dc.type |
Article |
en |