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Please use this identifier to cite or link to this item: http://dspace.lib.cranfield.ac.uk/handle/1826/1854

Document Type: Postprint
Title: Characterisation of PZT thin film micro-actuators using a silicon micro-force sensor.
Authors: Duval, Fabrice F. C.
Wilson, Stephen A.
Ensell, Graham
Evanno, Nicolas M. P.
Cain, Markys G.
Whatmore, Roger W.
Issue Date: 8-Jan-2007
Citation: Fabrice F.C. Duval, Stephen A. Wilson, Graham Ensell, Nicolas M.P. Evanno, Markys G. Cain and Roger W. Whatmore, Characterisation of PZT thin film micro-actuators using a silicon micro-force sensor, Sensors and Actuators A: Physical, Volume 133, Issue 1, 8 January 2007, Pages 35-44.
Abstract: This paper reports on the measurements of displacement and blocking force of piezoelectric micro-cantilevers. The free displacement was studied using a surface profiler and a laser vibrometer. The experimental data were compared with an analytical model which showed that the PZT thin film has a Young's modulus of 110 GPa and a piezoelectric coefficient d31,f of 30 pC/N. The blocking force was investigated by means of a micro-machined silicon force sensor based on the silicon piezoresistive effect. The generated force was detected by measuring a change in voltage within a piezoresistors bridge. The sensor was calibrated using a commercial nano-indenter as a force and displacement standard. Application of the method showed that a 700 μm long micro-cantilever showed a maximum displacement of 800 nm and a blocking force of 0.1 mN at an actuation voltage of 5 V, within experimental error of the theoretical predictions based on the known piezoelectric and elastic properties of the PZT film.
URI: http://hdl.handle.net/1826/1854
Appears in Collections:Staff publications - School of Applied Sciences

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