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|Document Type: ||Postprint|
|Title: ||Characterisation of PZT thin film micro-actuators using a silicon micro-force sensor.|
|Authors: ||Duval, Fabrice F. C.|
Wilson, Stephen A.
Evanno, Nicolas M. P.
Cain, Markys G.
Whatmore, Roger W.
|Issue Date: ||8-Jan-2007|
|Citation: ||Fabrice F.C. Duval, Stephen A. Wilson, Graham Ensell, Nicolas M.P. Evanno, Markys G. Cain and Roger W. Whatmore, Characterisation of PZT thin film micro-actuators using a silicon micro-force sensor, Sensors and Actuators A: Physical, Volume 133, Issue 1, 8 January 2007, Pages 35-44.|
|Abstract: ||This paper reports on the measurements of displacement and blocking force of piezoelectric micro-cantilevers. The free displacement was studied using a surface profiler and a laser vibrometer. The experimental data were compared with an analytical model which showed that the PZT thin film has a Young's modulus of 110 GPa and a piezoelectric coefficient d31,f of 30 pC/N. The blocking force was investigated by means of a micro-machined silicon force sensor based on the silicon piezoresistive effect. The generated force was detected by measuring a change in voltage within a piezoresistors bridge. The sensor was calibrated using a commercial nano-indenter as a force and displacement standard. Application of the method showed that a 700 μm long micro-cantilever showed a maximum displacement of 800 nm and a blocking force of 0.1 mN at an actuation voltage of 5 V, within experimental error of the theoretical predictions based on the known piezoelectric and elastic properties of the PZT film.|
|Appears in Collections:||Staff publications - School of Applied Sciences|
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