Non-linearities in interferometric displacement measurements commonly affect both homodyne and heterodyne optical interferometers. Unwanted back reflections (ghost reflections) or polarisation leakage introduce non-linearity ...

Displacement measuring interferometers, commonly employed for traceable measurements at the nanoscale, suffer from non-linearities in the measured displacement that limit the achievable measurement uncertainty for microscopic ...

The use of polarizing optics for both beam steering and phase measurement applications in displacement measuring interferometer designs is almost universal. Interferometer designs that employ polarizing optics in this ...