Correction of periodic displacement non-linearities by two-wavelength interferometry - associated data

Date

2021-08-23 10:26

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Cranfield University

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Citation

Bridges, Angus; Yacoot, Andrew; Kissinger, Thomas; Humphreys, David; Tatam, Ralph (2021). Correction of periodic displacement non-linearities by two-wavelength interferometry - associated data. Cranfield Online Research Data (CORD). Dataset. https://doi.org/10.17862/cranfield.rd.14381993

Abstract

Data associated with the publication "Correction of periodic displacement non-linearities by two-wavelength interferometry".

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Keywords

Interferometry', 'Non-linearity', 'Dimensional Metrology', 'Applied Physics', 'Optical Physics not elsewhere classified'

Rights

CC BY 4.0

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