Dorey, Robert A.Rocks, Sophie A.Dauchy, FlorentNavarro, A.2013-02-032013-02-032006-10-10R.A. Dorey, S. Rocks, F. Dauchy, A. Navarro, New Advances in Forming Functional Ceramics for Micro Devices, Advances in Science and Technology, Volume 45, 2006, Pages 2440-24471662-8969http://dx.doi.org/10.4028/www.scientific.net/AST.45.2440http://dspace.lib.cranfield.ac.uk/handle/1826/1777Micro electromechanical systems (MEMS) are finding uses in an increasing number of diverse applications. Currently the fabrication techniques used to produce such MEMS devices are primarily based on 2-D processing of thin films. The challenges faced by producing more complex structures (e.g. high aspect ratio, spans, and multi-material structures) require the development of new processing techniques. Potential solutions to these challenges based on low temperature processing of functional ceramics, selective chemical patterning, and micro-moulding are presented to show that it is possible to create complex functional ceramic structures which incorporate non-ceramic conducting and support structures. The capabilities of both techniques are compared and the relative advantages of each explored.PZTMEMSmicrosystemsArticle