Design of a motorised plasma delivery system for ultra-precision large optical fabrication

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dc.contributor.authorZhou, Hui
dc.contributor.authorBennett, Adam
dc.contributor.authorCastelli, Marco
dc.contributor.authorJourdain, Renaud
dc.contributor.authorGuo, Jiang
dc.contributor.authorYu, Nan
dc.date.accessioned2021-01-22T15:34:44Z
dc.date.available2021-01-22T15:34:44Z
dc.date.issued2020-09-02
dc.description.abstractA unique plasma figuring (PF) process was created and demonstrated at Cranfield University for manufacturing extremely large telescopes. The atmospheric pressure processing is faster and more cost-effective than other finishing processes; thus, providing an important alternative for large optical surfaces. The industrial scale manufacturing of thousands of ultra-precision metre-scale optics requires a robust PF machine: this requirement is achieved by making the plasma delivery system (PDS) performance repeatable. In this study, a dedicated PDS for large optical manufacturing was proposed to meet the industrial requirement. The PDS is based on an L-type radiofrequency (RF) network, a power supply, and an inductively coupled plasma torch. However, the complexities of these technologies require an in depth understanding of the integrated components that from the PDS. A smart control system for the modified PDS was created. This novel control system aims to make the characterization process deterministic: by automating the tuning of critical electrical components in the RF network, which is achieved by the use of in-line metrology. This paper describes the main design aspects. The PDS was tested with a good correlation between capacitance and RF frequencies. The robust PDS design enables a stable discharge of plasma with a low deviation of RF signals during the total 15 hours' tesen_UK
dc.identifier.citationZhou H, Bennett A, Castelli M, et al., (2020) Design of a motorised plasma delivery system for ultra-precision large optical fabrication. International Journal of Extreme Manufacturing, Volume 2, Issue 4, 2020, Article number 045301en_UK
dc.identifier.issn2631-8644
dc.identifier.urihttps://doi.org/10.1088/2631-7990/abab49
dc.identifier.urihttps://dspace.lib.cranfield.ac.uk/handle/1826/16235
dc.language.isoenen_UK
dc.publisherIOPen_UK
dc.rightsAttribution 3.0 International*
dc.rights.urihttp://creativecommons.org/licenses/by/3.0/*
dc.subjectplasma delivery systemen_UK
dc.subjectRF networken_UK
dc.subjectinductively coupled plasmaen_UK
dc.subjectplasma figuringen_UK
dc.titleDesign of a motorised plasma delivery system for ultra-precision large optical fabricationen_UK
dc.typeArticleen_UK

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