Multiple intensity reference interferometry for the correction of sub-fringe displacement non-linearities

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dc.contributor.authorBridges, Angus
dc.contributor.authorYacoot, Andrew
dc.contributor.authorKissinger, Thomas
dc.contributor.authorTatam, Ralph P.
dc.date.accessioned2022-01-18T12:16:57Z
dc.date.available2022-01-18T12:16:57Z
dc.date.issued2021-12-06
dc.description.abstractDisplacement measuring interferometers, commonly employed for traceable measurements at the nanoscale, suffer from non-linearities in the measured displacement that limit the achievable measurement uncertainty for microscopic displacements. Two closely related novel non-linearity correction methodologies are presented here that allow for the correction of non-linearities in cases where the displacement covers much less than a full optical fringe. Both corrections have been shown, under ideal conditions, to be capable of reducing all residual non-linearity harmonics to below the 10 pm level.en_UK
dc.description.sponsorshipEngineering and Physical Sciences Research Council (EPSRC) EP/R511894/1 (Project 2199198). Department for Business, Energy and Industrial Strategy; Royal Academy of Engineering Research Fellowship F\201718\174.en_UK
dc.identifier.citationBridges A, Yacoot A, Kissinger T, Tatam RP. (2022) Multiple intensity reference interferometry for the correction of sub-fringe displacement non-linearities, Measurement Science and Technology, Volume 33, Issue 2, February 2022, Article number 025201en_UK
dc.identifier.eissn1361-6501
dc.identifier.issn0957-0233
dc.identifier.urihttps://doi.org/10.1088/1361-6501/ac3aad
dc.identifier.urihttps://dspace.lib.cranfield.ac.uk/handle/1826/17422
dc.language.isoenen_UK
dc.publisherIOPen_UK
dc.rightsAttribution 4.0 International*
dc.rights.urihttp://creativecommons.org/licenses/by/4.0/*
dc.subjectinterferometryen_UK
dc.subjectnon-linearityen_UK
dc.subjectdimensional metrologyen_UK
dc.titleMultiple intensity reference interferometry for the correction of sub-fringe displacement non-linearitiesen_UK
dc.typeArticleen_UK

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