Sol-gel derived lead zirconate titanate thick films and their improved pyroelectric properties
dc.contributor.author | Zhang, Qi | |
dc.contributor.author | Shaw, Christopher P. | |
dc.contributor.author | Huang, Zhaorong | |
dc.contributor.author | Whatmore, Roger W. | |
dc.date.accessioned | 2007-03-29T15:42:07Z | |
dc.date.available | 2007-03-29T15:42:07Z | |
dc.date.issued | 2004 | |
dc.description.abstract | The single-layer thickness of Pb(Zr0.3Ti0.7)O3(PZT 30/70) thin films made by the sol-gel process is often restricted by the appearance of cracks when a single layer is thicker than 100 nm. Making a film with 1μm thick needs more than 10 times coating cycles, which is sometimes unacceptable. In this study, a sol modified with an additive was used for the preparation of thick PZT films. The thickness of the films depends upon the rotation rate. Up to 700 nm crack-free single layers could be obtained. The deposited films crystallised as the perovskite structure on platinum-buffered silicon by heating at 550°C. The porosity of the thick films was a function of the single layer thickness. A dense PZT film with a single layer 140 nm thick was found to have a very high pyroelectric coefficient (p=2.36×10− 4CK− 1m− 2) and figure of merit (1.88×10− 5Pa− 0.5). The introduction of pores in the films reduced p. However, the figure of merit of the films exhibited a reasonably high value due to a dramatic reduction of dielectric constant. | en |
dc.format.extent | 721767 bytes | |
dc.format.mimetype | application/pdf | |
dc.identifier.citation | Zhang Q, Shaw CP, Huang Z, Whatmore RW. (2004) Sol-gel derived lead zirconate titanate thick films and their improved pyroelectric properties. Integrated Ferroelectrics, Volume 64, 2004, pp. 207-216 | en |
dc.identifier.issn | 1058-4587 | |
dc.identifier.uri | http://hdl.handle.net/1826/1532 | |
dc.identifier.uri | http://dx.doi.org/10.1080/10584580490894348 | |
dc.language.iso | en | en |
dc.publisher | Taylor and Francis | en |
dc.title | Sol-gel derived lead zirconate titanate thick films and their improved pyroelectric properties | en |
dc.type | Article | en |