Three-dimensional interferometric stage encoder using a single access port

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dc.contributor.authorWiseman, Kieran B.
dc.contributor.authorKissinger, Thomas
dc.contributor.authorTatam, Ralph P.
dc.date.accessioned2020-09-07T15:52:44Z
dc.date.available2020-09-07T15:52:44Z
dc.date.freetoread2021-08-31
dc.date.issued2020-08-30
dc.description.abstractWe present a novel multi-dimensional positional encoder approach that uses range-resolved interferometry (RRI) to simultaneously interrogate multiple interferometers differing in optical path length, using only a single photo detector and a single diode laser. Employing only stage-mounted non-polarising beamsplitters and reflections from three orthogonal, externally mounted, planar mirrors, three Cartesian measurement directions are formed, that when combined with measurements from a stage-mounted reference reflection, allow for three-dimensional measurements of stage motion obtained via a single access port. Through a variety of movements of a three-dimensional Piezo-electric stage over its nominal stage working range of ± 50 μm, simultaneous measurements of displacements from three orthogonal dimensions are acquired with a 10 kHz quadrature bandwidth, achieving typical displacement noise densities of below 0.4 nm/√Hz with the noise floor dropping to below 0.1 nm/√Hz above 50 Hz, as well as high linearity with cyclic errors amplitudes well below 1 nm in all three directions.en_UK
dc.identifier.citationWiseman KB, Kissinger T, Tatam RP. (2021) Three-dimensional interferometric stage encoder using a single access port. Optics and Lasers in Engineering, Volume 137, February 2021, Article number 106342en_UK
dc.identifier.cris27789551
dc.identifier.issn0143-8166
dc.identifier.urihttps://doi.org/10.1016/j.optlaseng.2020.106342
dc.identifier.urihttps://dspace.lib.cranfield.ac.uk/handle/1826/15767
dc.language.isoenen_UK
dc.publisherElsevieren_UK
dc.rightsAttribution-NonCommercial-NoDerivatives 4.0 International*
dc.rights.urihttp://creativecommons.org/licenses/by-nc-nd/4.0/*
dc.subjectDisplacement measurementen_UK
dc.subjectRange-resolvedinterferometryen_UK
dc.subjectDiode lasersen_UK
dc.subjectDimensional metrologyen_UK
dc.subjectOptical encoderen_UK
dc.subjectInterferometryen_UK
dc.titleThree-dimensional interferometric stage encoder using a single access porten_UK
dc.typeArticleen_UK

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