New Advances in Forming Functional Ceramics for Micro Devices
| dc.contributor.author | Dorey, Robert A. | - |
| dc.contributor.author | Rocks, Sophie A. | - |
| dc.contributor.author | Dauchy, Florent | - |
| dc.contributor.author | Navarro, A. | - |
| dc.date.accessioned | 2013-02-03T23:01:05Z | |
| dc.date.available | 2013-02-03T23:01:05Z | |
| dc.date.issued | 2006-10-10T00:00:00Z | - |
| dc.description.abstract | Micro electromechanical systems (MEMS) are finding uses in an increasing number of diverse applications. Currently the fabrication techniques used to produce such MEMS devices are primarily based on 2-D processing of thin films. The challenges faced by producing more complex structures (e.g. high aspect ratio, spans, and multi-material structures) require the development of new processing techniques. Potential solutions to these challenges based on low temperature processing of functional ceramics, selective chemical patterning, and micro-moulding are presented to show that it is possible to create complex functional ceramic structures which incorporate non-ceramic conducting and support structures. The capabilities of both techniques are compared and the relative advantages of each explored. | en_UK |
| dc.identifier.citation | R.A. Dorey, S. Rocks, F. Dauchy, A. Navarro, New Advances in Forming Functional Ceramics for Micro Devices, Advances in Science and Technology, Volume 45, 2006, Pages 2440-2447 | - |
| dc.identifier.issn | 1662-8969 | - |
| dc.identifier.uri | http://dx.doi.org/10.4028/www.scientific.net/AST.45.2440 | - |
| dc.identifier.uri | http://dspace.lib.cranfield.ac.uk/handle/1826/1777 | |
| dc.subject | PZT | en_UK |
| dc.subject | MEMS | en_UK |
| dc.subject | microsystems | en_UK |
| dc.title | New Advances in Forming Functional Ceramics for Micro Devices | en_UK |
| dc.type | Article | - |
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