Three-dimensional interferometric stage encoder using a single access port

Files

Fig_3_RRI_Processing_Graphs.zip (172.49 KB)
Fig_4_Step_Motion_Graphs.zip (242.21 MB)
Fig_5_Stage_Comparison_Graphs.zip (14.9 MB)
Fig_6_DASD_Graphs.zip (1.81 MB)
Fig_7_Linearity_FFT_Graphs.zip (1004.02 KB)

Date published

2020-09-03 11:26

Free to read from

Authors

Wiseman, Kieran
Kissinger, Thomas
Tatam, Ralph

Supervisor/s

Journal Title

Journal ISSN

Volume Title

Publisher

Cranfield University

Department

Type

Dataset

ISSN

Format

URI

https://dspace.lib.cranfield.ac.uk/handle/1826/22405

Citation

Wiseman, Kieran; Kissinger, Thomas; Tatam, Ralph (2020). Three-dimensional interferometric stage encoder using a single access port. Cranfield Online Research Data (CORD). Dataset. https://doi.org/10.17862/cranfield.rd.11777853

Abstract

Research Data for Paper "Three-dimensional interferometric stage encoder using a single access port" by Kieran B. Wiseman, Thomas Kissinger and Ralph P. Tatam, Cranfield University, UK

Description

Software Description

Software Language

Github

Keywords

interferometric technique', 'interferometric measurements', 'Optical Encoding', 'metrology applications', 'metrology technique', 'Photonics, Optoelectronics and Optical Communications', 'Nanometrology'

DOI

10.17862/cranfield.rd.11777853

Rights

CC BY 4.0
https://creativecommons.org/licenses/by/4.0/

Relationships

Relationships

Resources

Funder/s

EPSRC UK EP/N509450/1

Collections

Transport Systems