Correction of periodic displacement non-linearities by two-wavelength interferometry

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dc.contributor.authorBridges, Angus
dc.contributor.authorYacoot, Andrew
dc.contributor.authorKissinger, Thomas
dc.contributor.authorHumphreys, David A.
dc.contributor.authorTatam, Ralph P.
dc.date.accessioned2021-09-22T15:36:39Z
dc.date.available2021-09-22T15:36:39Z
dc.date.issued2021-08-31
dc.description.abstractNon-linearities in interferometric displacement measurements commonly affect both homodyne and heterodyne optical interferometers. Unwanted back reflections (ghost reflections) or polarisation leakage introduce non-linearity terms at harmonics of the illuminating wavelength that cannot be fully corrected for with standard non-linearity correction techniques. A two-wavelength interferometric approach, operating at 632.8 and 785 nm, is presented here that is capable of correcting such non-linearities. Non-linearities are separated from the difference between two displacement measurements made at differing wavelengths with a Fourier approach. Compared to a standard Heydemann ellipse fitting correction, the proposed approach reduces estimated residual non-linearities from 84 to 11 pm in the case of a linear displacement profile. In particular this approach is applicable to the correction of higher order non-linearities that are caused by multiple reflections, and that are therefore very sensitive to alignment conditions.en_UK
dc.identifier.citationBridges A, Yacoot A, Kissinger T, et al., (2021) Correction of periodic displacement non-linearities by two-wavelength interferometry. Measurement Science and Technology, Volume 32, Issue 12, December 2021, Article number 125202en_UK
dc.identifier.issn0957-0233
dc.identifier.urihttps://doi.org/10.1088/1361-6501/ac1dfa
dc.identifier.urihttps://dspace.lib.cranfield.ac.uk/handle/1826/17093
dc.language.isoenen_UK
dc.publisherIOPen_UK
dc.rightsAttribution 4.0 International*
dc.rights.urihttp://creativecommons.org/licenses/by/4.0/*
dc.subjectdimensional metrologyen_UK
dc.subjectnon-linearityen_UK
dc.subjectinterferometryen_UK
dc.titleCorrection of periodic displacement non-linearities by two-wavelength interferometryen_UK
dc.typeArticleen_UK

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