Characterisation of PZT thin film micro-actuators using a silicon micro-force sensor

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dc.contributor.authorDuval, Fabrice F. C.
dc.contributor.authorWilson, Stephen A.
dc.contributor.authorEnsell, Graham
dc.contributor.authorEvanno, Nicolas M. P.
dc.contributor.authorCain, Markys G.
dc.contributor.authorWhatmore, Roger W.
dc.date.accessioned2007-09-03T11:45:37Z
dc.date.available2007-09-03T11:45:37Z
dc.date.issued2007-01-08
dc.description.abstractThis paper reports on the measurements of displacement and blocking force of piezoelectric micro-cantilevers. The free displacement was studied using a surface profiler and a laser vibrometer. The experimental data were compared with an analytical model which showed that the PZT thin film has a Young's modulus of 110 GPa and a piezoelectric coefficient d31,f of 30 pC/N. The blocking force was investigated by means of a micro-machined silicon force sensor based on the silicon piezoresistive effect. The generated force was detected by measuring a change in voltage within a piezoresistors bridge. The sensor was calibrated using a commercial nano-indenter as a force and displacement standard. Application of the method showed that a 700 μm long micro-cantilever showed a maximum displacement of 800 nm and a blocking force of 0.1 mN at an actuation voltage of 5 V, within experimental error of the theoretical predictions based on the known piezoelectric and elastic properties of the PZT film.en
dc.format.extent186234 bytes
dc.format.mimetypeapplication/pdf
dc.identifier.citationDuval FFC, Wilson SA, Ensell G, et al., (2007) Characterisation of PZT thin film micro-actuators using a silicon micro-force sensor. Sensors and Actuators A: Physical, Volume 133, Issue 1, January 2007, pp 35-44en
dc.identifier.issn0924-4247
dc.identifier.urihttps://doi.org/10.1016/j.sna.2006.03.035
dc.identifier.urihttp://hdl.handle.net/1826/1854
dc.language.isoenen
dc.publisherElsevieren
dc.subjectPZTen
dc.subjectCantileversen
dc.subjectVibrometryen
dc.subjectForce sensorsen
dc.subjectBlocking forceen
dc.titleCharacterisation of PZT thin film micro-actuators using a silicon micro-force sensoren
dc.typeArticleen

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