A method for assessing measurement precision and stability of optical probes

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dc.contributor.authorNorman, James
dc.contributor.authorTonnellier, Xavier
dc.contributor.authorMorantz, Paul
dc.date.accessioned2016-09-27T11:22:43Z
dc.date.available2016-09-27T11:22:43Z
dc.date.issued2016-06-30
dc.description.abstractThe current strategy for measuring non-specular metre-scale surfaces – for instance segmented freeform optics post-grinding – in the mid- frequency bandwidths (S-filter), involves the use of contact probe based systems where measurement precision is a limiting factor. Equivalent non-contact optical probes claim accuracies up to an order of magnitude higher and could therefore improve current measurement systems. Chromatic confocal probes measure the distance to a surface using the principle of axial chromatic dispersion. The stability of a CHRocodile SE 300 μm probe was shown to be 200 ± 20 nm over an eight hour measurement period. A probe holder should be designed with a low thermal expansion material in order to thermally insulate the probe measurement for further investigation. The accuracy of the probe was assessed at the extremes of its measurement range. The maximum deviation over a 5 μm displacement was measured to be 85 nm. The entire measuring range should be investigated.en_UK
dc.identifier.citationNorman J, Tonnellier X & Morantz P (2016) A method for assessing measurement precision and stability of optical probes.16th International Conference of the European Society for Precision Engineering and Nanotechnology (EUSPEN), 30th May - 3rd June 2016, Nottingham, UK.en_UK
dc.identifier.urihttps://dspace.lib.cranfield.ac.uk/handle/1826/10600
dc.identifier.urihttp://www.ultraprecision.org/wp-content/uploads/2016/06/Norman-euspen-2016.pdf
dc.language.isoenen_UK
dc.publisherEuropean Society for Precision Engineering and Nanotechnologyen_UK
dc.rightsAttribution-NonCommercial 4.0 International
dc.rights.urihttp://creativecommons.org/licenses/by-nc/4.0/
dc.subjectMetrologyen_UK
dc.subjectNon-specular surfacesen_UK
dc.subjectNon-contact probingen_UK
dc.subjectLong term stabilityen_UK
dc.titleA method for assessing measurement precision and stability of optical probesen_UK
dc.typeConference paperen_UK

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