Multiple intensity reference interferometry for the correction of sub-fringe displacement non-linearities - associated data

dc.contributor.author	Bridges, Angus
dc.contributor.author	Yacoot, Andrew
dc.contributor.author	Kissinger, Thomas
dc.contributor.author	Tatam, Ralph
dc.date.accessioned	2024-06-11T09:38:05Z
dc.date.available	2024-06-11T09:38:05Z
dc.date.issued	2021-11-19 11:13
dc.description.abstract	Data associated with the publication "Multiple intensity reference interferometry for the correction of sub-fringe displacement non-linearities".
dc.description.sponsorship	Optical metrology to support the next generation of nanopositioning
dc.identifier.citation	Bridges, Angus; Yacoot, Andrew; Kissinger, Thomas; Tatam, Ralph (2021). Multiple intensity reference interferometry for the correction of sub-fringe displacement non-linearities - associated data. Cranfield Online Research Data (CORD). Dataset. https://doi.org/10.17862/cranfield.rd.16460430
dc.identifier.doi	10.17862/cranfield.rd.16460430
dc.identifier.uri	https://dspace.lib.cranfield.ac.uk/handle/1826/22412
dc.publisher	Cranfield University
dc.relation.isreferencedby	https://doi.org/10.1088/1361-6501/ac3aad'
dc.rights	CC BY 4.0
dc.rights.uri	https://creativecommons.org/licenses/by/4.0/
dc.subject	Interferometry'
dc.subject	'Non-linearity'
dc.subject	'Dimensional Metrology'
dc.subject	'Optical Physics not elsewhere classified'
dc.subject	'Nanometrology'
dc.title	Multiple intensity reference interferometry for the correction of sub-fringe displacement non-linearities - associated data
dc.type	Dataset