Multiple intensity reference interferometry for the correction of sub-fringe displacement non-linearities - associated data

Files

figure_7_scan_data.dat (1.27 MB)
figure_7_calibration_data.dat (441 B)
figure_6_scan_data.zip (88.78 MB)
figure_6_calibration_data.dat (441 B)
figure_4_and_5_scan_data.dat (130.41 KB)

Date published

2021-11-19 11:13

Free to read from

Authors

Bridges, Angus
Yacoot, Andrew
Kissinger, Thomas
Tatam, Ralph

Supervisor/s

Journal Title

Journal ISSN

Volume Title

Publisher

Cranfield University

Department

Type

Dataset

ISSN

Format

URI

https://dspace.lib.cranfield.ac.uk/handle/1826/22412

Citation

Bridges, Angus; Yacoot, Andrew; Kissinger, Thomas; Tatam, Ralph (2021). Multiple intensity reference interferometry for the correction of sub-fringe displacement non-linearities - associated data. Cranfield Online Research Data (CORD). Dataset. https://doi.org/10.17862/cranfield.rd.16460430

Abstract

Data associated with the publication "Multiple intensity reference interferometry for the correction of sub-fringe displacement non-linearities".

Description

Software Description

Software Language

Github

Keywords

Interferometry', 'Non-linearity', 'Dimensional Metrology', 'Optical Physics not elsewhere classified', 'Nanometrology'

DOI

10.17862/cranfield.rd.16460430

Rights

CC BY 4.0
https://creativecommons.org/licenses/by/4.0/

Relationships

Relationships

https://doi.org/10.1088/1361-6501/ac3aad'

Resources

Funder/s

Optical metrology to support the next generation of nanopositioning

Collections

Transport Systems