Correction of periodic displacement non-linearities by two-wavelength interferometry - associated data

Files

mirrored_linear_scan_data.dat (201.17 KB)
linear_scan_data.dat (100.59 KB)
sine_scan_data.dat (305.61 KB)

Date published

2021-08-23 10:26

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Authors

Bridges, Angus
Yacoot, Andrew
Kissinger, Thomas
Humphreys, David
Tatam, Ralph

Supervisor/s

Journal Title

Journal ISSN

Volume Title

Publisher

Cranfield University

Department

Type

Dataset

ISSN

Format

URI

https://dspace.lib.cranfield.ac.uk/handle/1826/22411

Citation

Bridges, Angus; Yacoot, Andrew; Kissinger, Thomas; Humphreys, David; Tatam, Ralph (2021). Correction of periodic displacement non-linearities by two-wavelength interferometry - associated data. Cranfield Online Research Data (CORD). Dataset. https://doi.org/10.17862/cranfield.rd.14381993

Abstract

Data associated with the publication "Correction of periodic displacement non-linearities by two-wavelength interferometry".

Description

Software Description

Software Language

Github

Keywords

Interferometry', 'Non-linearity', 'Dimensional Metrology', 'Applied Physics', 'Optical Physics not elsewhere classified'

DOI

10.17862/cranfield.rd.14381993

Rights

CC BY 4.0
https://creativecommons.org/licenses/by/4.0/

Relationships

Relationships

https://doi.org/10.1088/1361-6501/ac1dfa'

Supplements

Funder/s

Industrial CASE Account - Cranfield University 2017

Collections

Transport Systems