In-plane excitation of thin silicon cantilevers using piezoelectric thin films
| dc.contributor.author | Leighton, Glenn J. T. | - |
| dc.contributor.author | Kirby, Paul B. | - |
| dc.contributor.author | Fox, Colin H. J. | - |
| dc.date.accessioned | 2012-02-21T23:02:47Z | |
| dc.date.available | 2012-02-21T23:02:47Z | |
| dc.date.issued | 2007-10-29T00:00:00Z | - |
| dc.description.abstract | This paper deals with the actuation of in-plane and out-of-plane motions of silicon cantilevers, using a single thin film of lead zirconate titanate with a divided electrode configuration. In-plane actuation is demonstrated practically, and excellent agreement is obtained between theoretically predicted and experimentally measured resonant amplitudes, for the fundamental out-of-plane and in-plane modes of vibration of the fabricated test cantilevers. | en_UK |
| dc.identifier.citation | Glenn J. T. Leighton, Paul B. Kirby, and Colin H. J. Fox. In-plane excitation of thin silicon cantilevers using piezoelectric thin films. Applied Physics Letters, 2007, Volume 91, Issue 18, 183510. | |
| dc.identifier.issn | 0003-6951 | - |
| dc.identifier.uri | http://dx.doi.org/10.1063/1.2805070 | - |
| dc.identifier.uri | http://dspace.lib.cranfield.ac.uk/handle/1826/7017 | |
| dc.publisher | American Institute of Physics | en_UK |
| dc.title | In-plane excitation of thin silicon cantilevers using piezoelectric thin films | en_UK |
| dc.type | Article | - |