In-plane excitation of thin silicon cantilevers using piezoelectric thin films
Date published
2007-10-29T00:00:00Z
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American Institute of Physics
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Article
ISSN
0003-6951
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Glenn J. T. Leighton, Paul B. Kirby, and Colin H. J. Fox. In-plane excitation of thin silicon cantilevers using piezoelectric thin films. Applied Physics Letters, 2007, Volume 91, Issue 18, 183510.
Abstract
This paper deals with the actuation of in-plane and out-of-plane motions of silicon cantilevers, using a single thin film of lead zirconate titanate with a divided electrode configuration. In-plane actuation is demonstrated practically, and excellent agreement is obtained between theoretically predicted and experimentally measured resonant amplitudes, for the fundamental out-of-plane and in-plane modes of vibration of the fabricated test cantilevers.