Correlation and convolution filtering and image processing for pitch evaluation of 2D micro- and nano-scale gratings and lattices

Simple item page
dc.contributor.authorChen, Xiaomei
dc.contributor.authorKoenders, Ludger
dc.contributor.authorParkinson, Simon
dc.date.accessioned2017-03-28T09:50:46Z
dc.date.available2017-03-28T09:50:46Z
dc.date.issued2017-03-14
dc.description.abstractWe have mathematically explicated and experimentally demonstrated how a correlation and convolution filter can dramatically suppress the noise that coexists with the scanned topographic signals of 2D gratings and lattices with 2-dimensional (2D) perspectives. To realize pitch evaluation, the true peaks’ coordinates have been precisely acquired after detecting the local maxima from the filtered signal, followed by image processing. The combination of 2D filtering, local-maxima detecting and image processing make up the pitch detection (PD) method. It is elucidated that the pitch average, uniformity, rotation angle and orthogonal angle can be calculated using the PDmethod. This has been applied to the pitch evaluation of several 2D gratings and lattices, and the results are compared with the results of using the CG- and FT-method. The differences of pitch averages which are produced using the PD-, CG- and FT-methods are within 1.5 pixels. Moreover, the PD-method has also been applied to detect the dense peaks of Si (111) 7×7 surface and the HOPG basal plane.en_UK
dc.identifier.citationXiaomei Chen, Ludger Koenders, and Simon Parkinson. Correlation and convolution filtering and image processing for pitch evaluation of 2D micro- and nano-scale gratings and lattices. Applied Optics, 2017, Volume 56, Issue 9, pp2434-2443en_UK
dc.identifier.issn1559-128X
dc.identifier.issnhttp://dx.doi.org/10.1364/AO.56.002434
dc.identifier.urihttps://dspace.lib.cranfield.ac.uk/handle/1826/11669
dc.language.isoenen_UK
dc.publisherOptical Society of Americaen_UK
dc.rights© 2017 Optical Society of America. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modifications of the content of this paper are prohibited.
dc.rightsAttribution-NonCommercial 4.0 International
dc.rights.urihttp://creativecommons.org/licenses/by-nc/4.0/
dc.subjectInstrumentationen_UK
dc.subjectmeasurementen_UK
dc.subjectmetrologyen_UK
dc.subjectImaging processingen_UK
dc.subjectSpatial filteringen_UK
dc.subjectMicroscopyen_UK
dc.titleCorrelation and convolution filtering and image processing for pitch evaluation of 2D micro- and nano-scale gratings and latticesen_UK
dc.typeArticleen_UK

Files

Original bundle
Now showing 1 - 1 of 1
Thumbnail Image
Name:
2D_pitch_evaluation_based_on_CC_filtering-2017.pdf
Size:
684.66 KB
Format:
Adobe Portable Document Format
Description:
Download
License bundle
Now showing 1 - 1 of 1
No Thumbnail Available
Name:
license.txt
Size:
1.79 KB
Format:
Item-specific license agreed upon to submission
Description:
Download

Collections

Staff publications (SATM)