In-plane excitation of thin silicon cantilevers using piezoelectric thin films

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dc.contributor.authorLeighton, Glenn J. T.
dc.contributor.authorKirby, Paul B.
dc.contributor.authorFox, Colin H. J.
dc.date.accessioned2010-04-27T09:23:08Z
dc.date.available2010-04-27T09:23:08Z
dc.date.issued2007-10
dc.description.abstractThis paper deals with the actuation of in-plane and out-of-plane motions of silicon cantilevers, using a single thin film of lead zirconate titanate with a divided electrode configuration. In-plane actuation is demonstrated practically, and excellent agreement is obtained between theoretically predicted and experimentally measured resonant amplitudes, for the fundamental out-of-plane and in-plane modes of vibration of the fabricated test cantilevers.en_UK
dc.identifier.citationGlenn J.T. Leighton, Paul B. Kirby, Colin H.J. Fox, In-plane excitation of thin silicon cantilevers using piezoelectric thin films, Applied Physics Letters, October 2007, Volume 91, Issue 18, 183510-183510-3en_UK
dc.identifier.issn0003-6951
dc.identifier.urihttps://doi.org/10.1063/1.2805070
dc.identifier.urihttp://hdl.handle.net/1826/4379
dc.language.isoenen_UK
dc.publisherAmerican Institute of Physicsen_UK
dc.titleIn-plane excitation of thin silicon cantilevers using piezoelectric thin filmsen_UK
dc.typeArticleen_UK

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