Converting Ceria Polyhedral Nanoparticles into Single-Crystal Nanospheres

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dc.contributor.authorXiangdong, F.
dc.contributor.authorSayle, D.C.
dc.contributor.authorZhong, L.W.
dc.contributor.authorParas, M.S.
dc.contributor.authorSantora, B.
dc.contributor.authorSutorik, A.C.
dc.contributor.authorSayle, T.X.T.
dc.contributor.authorYi, Y.
dc.contributor.authorYong, D.
dc.contributor.authorXudong, W.
dc.contributor.authorYie-Shein, Her
dc.date.accessioned2008-05-27T14:14:25Z
dc.date.available2008-05-27T14:14:25Z
dc.date.issued2008-05-27T14:14:25Z
dc.description.abstractCeria (CeO2) nanoparticles are one of the key abrasive materials for chemical-mechanical planarization (CMP) of advanced integrated circuits. However, CeO2 nanoparticles synthesized by all existing techniques are faceted with irregular faceted-shapes, and they scratch the silicon wafers with increased defect concentrations. Here, we show for the first time an innovative approach for large-scale synthesis of spherical, single-crystal, CeO2 nanoparticles. Our synthetic strategy involves doping the CeO2 system with titanium, using flame temperatures that facilitate crystallization of the CeO2, yet retains the TiO2 in a molten state. In conjunction with Molecular Dynamics simulation, we show that under these conditions, the inner CeO2 core evolves in a single-crystal spherical-shape without faceting, because, throughout the crystallization, it is completely encapsulated by a molten 1-2 nm shell of TiO2, which, in liquid state, minimizes the surface energy. The single-crystal nanospheres reduce CMP defects by 80% and increase the silica removal rate by 50%, which will facilitate precise and reliable mass-manufacturing of chips for nanoelectronics at a precision of sub-nanometers. The principle demonstrated here could be applied to other oxide systems.en_UK
dc.identifier.citationSCIENCE Vol 312 Issue 5779 Pages 1504-1508 June 9 2006
dc.identifier.issn0036-8075
dc.identifier.urihttp://hdl.handle.net/1826/2582
dc.language.isoenen_UK
dc.titleConverting Ceria Polyhedral Nanoparticles into Single-Crystal Nanospheresen_UK
dc.typeArticleen_UK

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