The synthesis of CuxS from Cu layers by low pressure plasma processing

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dc.contributor.authorBall, J.
dc.contributor.authorLane, David W.
dc.contributor.authorReehal, H. S.
dc.date.accessioned2017-05-25T10:22:54Z
dc.date.available2017-05-25T10:22:54Z
dc.date.issued2017-03-04
dc.description.abstractA new method of converting Cu layers to CuxS on glass at low pressure using an electron cyclotron resonance plasma and SF6 gas is presented. The process operates at low temperatures and short time scales. Trends in film crystallinity and morphology are identified in relation to process time and temperature. These show that sulphurisation is most likely complete within 10 min and that the sulphur content of the films reduces as the conversion temperature is increased from 473 to 623 K. Optical measurements show that the films have a direct bandgap of ∼2.5 eV which is consistent with published values for CuxS films grown by other techniques. Analysis by SEM has revealed that the films possess a complicated structure of platelets covering a denser underlying film. This may account for the differences in observations made by XRF and Raman spectroscopy, which both indicated a mixture of CuS and Cu2S, and X-ray diffraction which predominantly showed CuS.en_UK
dc.identifier.citationBall J, Lane DW, Reehal HS. (2017) The synthesis of CuxS from Cu layers by low pressure plasma processing, Journal of Alloys and Compounds, Volume 708, June 2017, pp. 1124-1130en_UK
dc.identifier.cris16982833
dc.identifier.issn0925-8388
dc.identifier.urihttp://dx.doi.org/10.1016/j.jallcom.2017.03.011
dc.identifier.urihttp://dspace.lib.cranfield.ac.uk/handle/1826/11929
dc.language.isoenen_UK
dc.publisherElsevieren_UK
dc.rightsAttribution-NonCommercial-NoDerivatives 4.0 International
dc.rights.urihttp://creativecommons.org/licenses/by-nc-nd/4.0/
dc.subjectSemiconductorsen_UK
dc.subjectThin filmsen_UK
dc.subjectVapour depositionen_UK
dc.subjectSEMen_UK
dc.subjectX-ray diffractionen_UK
dc.titleThe synthesis of CuxS from Cu layers by low pressure plasma processingen_UK
dc.typeArticleen_UK

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