Considerations on the proposed linear theory of surface measurement for coherence scanning interferometers

dc.contributor.authorHenning, A. J.
dc.contributor.authorGiusca, Claudiu-Laurentiu
dc.date.accessioned2017-05-12T09:04:36Z
dc.date.available2017-05-12T09:04:36Z
dc.date.issued2017-02-22
dc.description.abstractIt was suggested in [Appl. Opt. 52, 3662 (2013) [CrossRef(external)] ] that the result of a measurement via coherence scanning interferometry could be viewed as the convolution of a point spread function of the instrument and an open surface in 3D space that lies at the air/material interface over a portion of the object’s surface. Further, it was suggested that by measuring certain objects, such as ones that are very close to spherical, and whose surface is known to a sufficient level of accuracy, that a point spread function for the instrument could be determined from the measurement result. We conclude that the approximations used in this calculation do not give sufficient accuracy to allow this to be achieved, and that the truncation of the surface function from the closed surface surrounding the object is not defined sufficiently well in order to give a unique solution to the problem. The physical justification for the truncation of the surface in this manner is also questioneden_UK
dc.identifier.citationHenning AJ, Giusca CL. (2017) Considerations on the proposed linear theory of surface measurement for coherence scanning interferometers. Applied Optics, Volume 56, Issue 10, April 2017, pp. 2960-2967.en_UK
dc.identifier.issn1559-128X
dc.identifier.urihttps://doi.org/10.1364/AO.56.002960
dc.identifier.urihttps://dspace.lib.cranfield.ac.uk/handle/1826/11879
dc.language.isoenen_UK
dc.publisherOptical Society of Americaen_UK
dc.rightsAttribution-Non-Commercial 3.0 Unported
dc.rights.urihttps://creativecommons.org/licenses/by/3.0/
dc.subject(120.3940) Metrologyen_UK
dc.subject(110.4850) Optical transfer functionsen_UK
dc.subject(180.6900) Three-dimensional microscopyen_UK
dc.subject(120.0120) Instrumentationen_UK
dc.subjectmeasurementen_UK
dc.subjectand metrologyen_UK
dc.subject(120.3180) Interferometryen_UK
dc.subject(240.6700) Surfacesen_UK
dc.titleConsiderations on the proposed linear theory of surface measurement for coherence scanning interferometersen_UK
dc.typeArticleen_UK

Files

Original bundle
Now showing 1 - 1 of 1
Loading...
Thumbnail Image
Name:
Considerations_on_the_proposed_linear-2017.pdf
Size:
515.58 KB
Format:
Adobe Portable Document Format
License bundle
Now showing 1 - 1 of 1
No Thumbnail Available
Name:
license.txt
Size:
1.79 KB
Format:
Item-specific license agreed upon to submission
Description: