Development aspects of an integrated pyroelectric array incorporating a thin PZT film and radiation collectors

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dc.contributor.authorShaw, Christopher P.
dc.contributor.authorLandi, Spartaco
dc.contributor.authorWhatmore, Roger W.
dc.contributor.authorKirby, Paul B.
dc.date.accessioned2007-05-22T15:38:27Z
dc.date.available2007-05-22T15:38:27Z
dc.date.issued2004
dc.description.abstractAbstract Work is being undertaken to produce an uncooled pyroelectric infra-red detector array which incorporates within its structure, an array of radiation collectors made by the bulk micro-machining of silicon. Development aspects of the processing route are presented here.en
dc.format.extent97672 bytes
dc.format.mimetypeapplication/pdf
dc.identifier.citationShaw C, Landi S, Whatmore R, Kirby P. (2004) Development aspects of an integrated pyroelectric array incorporating a thin PZT film and radiation collectors. Integrated Ferroelectrics, Volume 63, Issue 1, pp. 93-97en
dc.identifier.issn1058-4587
dc.identifier.urihttp://hdl.handle.net/1826/1695
dc.identifier.urihttp://dx.doi.org/10.1080/10584580490458775
dc.language.isoenen
dc.publisherTaylor and Francisen
dc.subjectPyroelectric arrayen
dc.subjectmicromachiningen
dc.subjectcorona polingen
dc.titleDevelopment aspects of an integrated pyroelectric array incorporating a thin PZT film and radiation collectorsen
dc.typeArticleen

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