Development aspects of an integrated pyroelectric array incorporating a thin PZT film and radiation collectors
Date
2004
Supervisor/s
Journal Title
Journal ISSN
Volume Title
Publisher
Taylor and Francis
Department
Type
Article
ISSN
1058-4587
Format
Free to read from
Citation
Shaw C, Landi S, Whatmore R, Kirby P. (2004) Development aspects of an integrated pyroelectric array incorporating a thin PZT film and radiation collectors. Integrated Ferroelectrics, Volume 63, Issue 1, pp. 93-97
Abstract
Abstract Work is being undertaken to produce an uncooled pyroelectric infra-red detector array which incorporates within its structure, an array of radiation collectors made by the bulk micro-machining of silicon. Development aspects of the processing route are presented here.
Description
Software Description
Software Language
Github
Keywords
Pyroelectric array, micromachining, corona poling