Wainstein, Dmitry; Kovalev, Anatoly I.; Vakhrushev, Vladimir; Gago, Raul; Endrino, José L.
(MDPI, 2018-08-18)
Multilayer nanolaminate TiAlN/Ag and Al2O3/Ag metal-insulator-metal (MIM) coatings with thicknesses of individual layers from a few to several hundreds of nanometers were fabricated by direct current magnetron sputtering. ...