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Considerations on the proposed linear theory of surface measurement for coherence scanning interferometers
Henning, A. J.
;
Giusca, Claudiu-Laurentiu
(
Optical Society of America
,
2017-02-22
)
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Author
Giusca, Claudiu-Laurentiu (1)
Henning, A. J. (1)
Subject
(110.4850) Optical transfer functions (1)
(120.0120) Instrumentation (1)
(120.3180) Interferometry (1)
(120.3940) Metrology (1)
(180.6900) Three-dimensional microscopy (1)
(240.6700) Surfaces (1)
and metrology (1)
measurement (1)
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Date Issued
2017 (1)