Citation:
R.V. Wright, G. Hakemi, P.B. Kirby. Integration of thin film bulk acoustic resonators onto flexible liquid crystal polymer substrates. Microelectronic Engineering, Volume 88, Issue 6, June 2011, Pages 1006–1009.
Abstract:
Thin film bulk acoustic resonators (FBARs) have been directly integrated on liquid crystal polymer (LCP) substrates for application to the field of flexible electronics. Particular developments required were chemo-mechanical polishing for LCP roughness reduction to enable growth of high quality ZnO films and a through substrate deep reactive ion etch process. Q values of up to 126 and 78 for series and parallel resonances combined with an electromechanical coefficient ∼ 6.7% were achieved. Further device development is needed but this performance is already sufficient for some chemical/biological sensing applications.
