Low fatigue lead zirconate titanate-based capacitors modified by manganese for nonvolatile memories

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dc.contributor.author Zhang, Qi en_UK
dc.contributor.author Whatmore, Roger W. en_UK
dc.date.accessioned 2005-11-23T10:54:20Z
dc.date.available 2005-11-23T10:54:20Z
dc.date.issued 2004-06-15 en_UK
dc.identifier.citation Q. Zhang and R. W. Whatmore, Low fatigue lead zirconate titanate-based capacitors modified by manganese for nonvolatile memories, Materials Science and Engineering B, Volume 109, Issues 1-3, 15 June 2004, Pages 136-140. en_UK
dc.identifier.issn 0921-5107
dc.identifier.uri http://hdl.handle.net/1826/793
dc.identifier.uri http://dx.doi.org/10.1016/j.mseb.2003.10.065
dc.description.abstract We have investigated the effects of Mn doping on the ferroelectric properties of Pb(Zr0.3Ti0.7)O3 (PZT) thin films on substrates Pt/Ti/SiO2/Si. Small amount of Mn-doped (≤1 mol%) PZT (PMZT) showed almost no hysteretic fatigue up to 1010 switching bipolar pulse cycles, coupled with excellent retention properties. We present evidence that while a low permittivity interfacial layer forms between the Pt electrode and PZT films, this does not occur in PMZT. We propose that Mn dopants are able to reduce oxygen vacancy mobility in PZT films and Mn2+ ions consume the oxygen vacancies generated during repeated switching, forming Mn4+ ions. These mechanisms are probably responsible for their low observed fatigue characteristics. en_UK
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dc.language.iso en en_UK
dc.publisher Elsevier en_UK
dc.title Low fatigue lead zirconate titanate-based capacitors modified by manganese for nonvolatile memories en_UK
dc.type Article en_UK


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