Abstract:
This thesis focuses on the use of high permittivity tunable dielectrics and more
specifically sol-gel ferroelectric thin films for low cost, high performance tunable
devices such as varactors and filters at RF and microwave frequencies. The topics
covered include measurement techniques for the characterization of tunable
dielectrics at low and microwave frequencies, fabrication processes, electrical and
acoustic modeling of thin film ferroelectric varactors, performance optimization
using conductive electrodes, realization of tunable microwave circuits and integration
of tunable dielectrics with conventional bulk acoustic wave resonators
(FBAR). Cont/d.
