Citation:
Usama M. Attia, and Jeffrey R. Alcock. Fabrication of ceramic micro-scale hollow components by micro-powder injection
moulding. Journal of the European Ceramic Society, Volume 32, Issue 6, June 2012, Pages 1199-1204
Abstract:
Rapid developments in microsystem technologies demand ceramic microcomponents of
increasing geometrical complexity. State-of-the-art microfabrication routes of
ceramics are either limited in geometrical complexity and/or high volume
capabilities. This paper presents a process route by which ceramic
microcomponents with relatively complex three-dimensional architectures could be
realised by a high-volume technique. The proposed strategy, in which yttria-
stabilised zirconia was implemented, combines the capabilities of insert-
micromoulding, powder micro-overmoulding, catalytic debinding and sintering. The
produced architectures demonstrate the capability of the technique to combine
the high performance of ceramic materials with the dimensional accuracy and mass
manufacturability of powder micromoulding.