Citation:
Glenn J. T. Leighton, Paul B. Kirby, and Colin H. J. Fox. In-plane excitation of thin silicon cantilevers using piezoelectric thin films. Applied Physics Letters, 2007, Volume 91, Issue 18, 183510.
Abstract:
This paper deals with the actuation of in-plane and out-of-plane motions of
silicon cantilevers, using a single thin film of lead zirconate titanate with a
divided electrode configuration. In-plane actuation is demonstrated practically,
and excellent agreement is obtained between theoretically predicted and
experimentally measured resonant amplitudes, for the fundamental out-of-plane
and in-plane modes of vibration of the fabricated test cantilevers.
