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Please use this identifier to cite or link to this item: http://dspace.lib.cranfield.ac.uk/handle/1826/6835

Document Type: Article
Title: Subsurface damage in precision ground ULE® and Zerodur® surfaces
Authors: Tonnellier, Xavier
Morantz, Paul
Shore, Paul
Baldwin, A.
Evans, R.
Walker, D. D.
Issue Date: 2007
Citation: X. Tonnellier, P. Morantz, P. Shore, A. Baldwin, R. Evans, and D. D. Walker, Subsurface damage in precision ground ULE® and Zerodur® surfaces, Optics Express, Volume 15, Issue 19, 2007, Pages 12197-12205.
Abstract: The total process cycle time for large ULE®and Zerodur®optics can be improved using a precise and rapid grinding process, with low levels of surface waviness and subsurface damage. In this paper, the amounts of defects beneath ULE®and Zerodur®surfaces ground using a selected grinding mode were compared. The grinding response was characterised by measuring: surface roughness, surface profile and subsurface damage. The observed subsurface damage can be separated into two distinct depth zones, which are: ‘process’ and ‘machine dynamics
URI: http://dx.doi.org/10.1364/OE.15.012197
Appears in Collections:Staff publications - School of Applied Sciences

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