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|Document Type: ||Article|
|Title: ||Subsurface damage in precision ground ULE® and Zerodur® surfaces|
|Authors: ||Tonnellier, Xavier|
Walker, D. D.
|Issue Date: ||2007|
|Citation: ||X. Tonnellier, P. Morantz, P. Shore, A. Baldwin, R. Evans, and D. D. Walker, Subsurface damage in precision ground ULE® and Zerodur® surfaces, Optics Express, Volume 15, Issue 19, 2007, Pages 12197-12205.|
|Abstract: ||The total process cycle time for large ULE®and Zerodur®optics can be improved
using a precise and rapid grinding process, with low levels of surface waviness
and subsurface damage. In this paper, the amounts of defects beneath ULE®and
Zerodur®surfaces ground using a selected grinding mode were compared. The
grinding response was characterised by measuring: surface roughness, surface
profile and subsurface damage. The observed subsurface damage can be separated
into two distinct depth zones, which are: ‘process’ and ‘machine dynamics|
|Appears in Collections:||Staff publications - School of Applied Sciences|
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