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|Document Type: ||Article|
|Title: ||Formation of PZT thick film single elements using EDHA deposition|
|Authors: ||Wang, D. Z.|
Dorey, Robert A.
|Issue Date: ||29-Sep-2011|
|Citation: ||D. Z. Wang and R. A. Dorey, Formation of PZT thick film single elements using EDHA deposition. Materials Science Forum, 2009, Vol. 628-629, pp405-410.|
|Abstract: ||In this paper, electrohydrodynamic atomization combined with a polymeric
micromoulding technique was used to form PZT single element devices using a PZT
sol-gel slurry without an etching process. The PZT single element device was
initially designed to work as a piezoelectric ultrasonic transducer consisting
of a circular or a square of various sizes, which wasproduced and used to
evaluate the process. The resulting PZT device had a homogenous microstructure.
It was observed that the relative permittivity of the circular and square single
element devices was especially high at small size due to the fringe effect. The
results show that the radius and width of the PZT single circular and square
element devices with a thickness of 15μm should be bigger than 400μm in order to
reduce the fringe effec|
|Appears in Collections:||Staff publications - School of Applied Sciences|
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