Citation:
S. Stoyanov, C. Bailey, Y. K. Tang, S. Marson, A. Dyer, D. Allen, M. Desmulliez, Computational modelling and optimisation of the fabrication of nano-structures using focused ion beam and imprint forming technologies, Journal of Physics: Conference Series, Volume 253, Number 1, 2010, Paper Number 012008.
Abstract:
Focused Ion Beam (FIB) and Nano-Imprint Forming (NIF) have gained recently major
interest because of their potential to enable the fabrication of precision
engineering parts and to deliver high resolution, low-cost and high-throughput
production of fine sub-micrometre structures respectively. Using computational
modelling and simulation becomes increasingly important in assessing
capabilities and risks of defects with respect to product manufacturability,
quality, reliability and performance, as well as controlling and optimising the
process parameters. A computational model that predicts the milling depth as
function of the ion beam dwell times and a number of process parameters in the
case of FIB milling is investigated and experimentally validated. The focus in
the NIF study is on modelling the material deformation and the filling of the
pattern grooves during the mould pressing using non-linear large deformation
finite element analysis with hyperelastic non-compressive material behaviour.
Simulation results are used to understand the risk of imperfections in the
pattern replication and to identify the optimal process parameters and their
interaction