Impedance measurements for determination of elastic and piezoelectric coefficients of films

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dc.contributor.author Pardo, L. -
dc.contributor.author Jiménez, R. -
dc.contributor.author García, A. -
dc.contributor.author Brebøl, K. -
dc.contributor.author Leighton, Glenn J. T. -
dc.contributor.author Huang, Zhaorong -
dc.date.accessioned 2011-03-31T23:11:01Z
dc.date.available 2011-03-31T23:11:01Z
dc.date.issued 2010-03-31T00:00:00Z -
dc.identifier.citation Pardo, L, Jiménez, R, García, A, Brebøl, K, Leighton, G, Huang, Z, Impedance measurements for determination of elastic and piezoelectric coefficients of films, Advances in Applied Ceramics, Volume 109, Number 3, March 2010, pp. 156-161.
dc.identifier.issn 1743-6753 -
dc.identifier.uri http://dx.doi.org/10.1179/174367509X12502621261497 -
dc.identifier.uri http://dspace.lib.cranfield.ac.uk/handle/1826/5058
dc.description.abstract Most of those techniques used for the measurement of elastic coefficients for bulk piezoelectric ceramics are not applicable to films deposited on thick substrates because the measured properties, such as the resonant frequency, are usually dominated by the presence of the thick substrate. This work presents a preliminary study for the application of the automatic iterative method of Alemany et al. for the determination, from complex impedance measurements, of the film properties using a conventional self‐supported cantilever design used in microelectromechanical system applications and fabricated from a PZT thick film on a Si based substrat en_UK
dc.language.iso en_UK en_UK
dc.publisher Maney Publishing en_UK
dc.title Impedance measurements for determination of elastic and piezoelectric coefficients of films en_UK
dc.type Article en_UK


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