Citation:
Pardo, L, Jiménez, R, García, A, Brebøl, K, Leighton, G, Huang, Z, Impedance measurements for determination of elastic and piezoelectric
coefficients of films, Advances in Applied Ceramics, Volume 109, Number 3, March 2010, pp. 156-161.
Abstract:
Most of those techniques used for the measurement of elastic coefficients for
bulk piezoelectric ceramics are not applicable to films deposited on thick
substrates because the measured properties, such as the resonant frequency, are
usually dominated by the presence of the thick substrate. This work presents a
preliminary study for the application of the automatic iterative method of
Alemany et al. for the determination, from complex impedance measurements, of
the film properties using a conventional self‐supported cantilever design used
in microelectromechanical system applications and fabricated from a PZT thick
film on a Si based substrat
