Development of mechanical reliability testing techniques with application to thin films and piezo MEMS components

Show simple item record

dc.contributor.advisor Kirby, Paul B. Gkotsis, Petros 2010-09-22T11:17:48Z 2010-09-22T11:17:48Z 2010-04
dc.description.abstract This work focuses on the development of a method for probing the mechani- cal response of thin film materials based on miniature tensile testing. A number of mechanisms that may compromise the performance and potentially limit the operational lifetime of MEMS devices which incorporate functional ferroelectric ceramics were also identified and investigated. Reliability of piezo MEMS com- ponents was studied at a wafer and at a device level through the development of appropriate techniques based on miniature tensile testing, time- resolved mi- cro RAMAN spectroscopy and laser Doppler vibrometry. Micro tensile testing was further used for the extraction of the elastic properties of various thin film materials. A miniature tensile stage was developed in common with DEBEN UK for the mechanical characterization of functional thin film materials like PZT and ZnO ceramics, which are commonly used in MEMS fabrication. The stage is of- fered with a piezo electric motor which can be fitted with interchangeable heads. These can be combined with di.erent types of mounting jaws, enabling both con- ventional tensile testing and compression testing to be performed. Strains and displacements were measured in- situ using an optical, non destructive method based on CCD imaging. The elastic constants of polymer (LCP), LCP-Au bi- layers and electroplated Ni were defined in good agreement with the literature. However yield of successfully released ceramic samples was rather poor so a col- laboration with IMTEK at Germany was established. Using their facilities batch processing of a large number of wafers was possible. Cont/d. en_UK
dc.language.iso en en_UK
dc.publisher Cranfield University en_UK
dc.rights © Cranfield University 2010. All rights reserved. No part of this publication may be reproduced without the written permission of the copyright holder. en_UK
dc.title Development of mechanical reliability testing techniques with application to thin films and piezo MEMS components en_UK
dc.type Thesis or dissertation en_UK
dc.type.qualificationlevel Doctoral en_UK
dc.type.qualificationname PhD en_UK

Files in this item

This item appears in the following Collection(s)

Show simple item record

Search CERES


My Account