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|Document Type: ||Article|
|Title: ||In-plane excitation of thin silicon cantilevers using piezoelectric thin films|
|Authors: ||Leighton, Glen J. T.|
Kirby, Paul B.
Fox, Colin H. J.
|Issue Date: ||Oct-2007|
|Citation: ||Glenn J.T. Leighton, Paul B. Kirby, Colin H.J. Fox, In-plane excitation of thin silicon cantilevers using piezoelectric thin films, Applied Physics Letters, October 2007, Volume 91, Issue 18, 183510-183510-3|
|Abstract: ||This paper deals with the actuation of in-plane and out-of-plane motions of silicon cantilevers, using a single thin film of lead zirconate titanate with a divided electrode configuration. In-plane actuation is demonstrated practically, and excellent agreement is obtained between theoretically predicted and experimentally measured resonant amplitudes, for the fundamental out-of-plane and in-plane modes of vibration of the fabricated test cantilevers.|
|Appears in Collections:||Staff publications - School of Applied Sciences|
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