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Please use this identifier to cite or link to this item: http://dspace.lib.cranfield.ac.uk/handle/1826/4379

Document Type: Article
Title: In-plane excitation of thin silicon cantilevers using piezoelectric thin films
Authors: Leighton, Glen J. T.
Kirby, Paul B.
Fox, Colin H. J.
Issue Date: Oct-2007
Citation: Glenn J.T. Leighton, Paul B. Kirby, Colin H.J. Fox, In-plane excitation of thin silicon cantilevers using piezoelectric thin films, Applied Physics Letters, October 2007, Volume 91, Issue 18, 183510-183510-3
Abstract: This paper deals with the actuation of in-plane and out-of-plane motions of silicon cantilevers, using a single thin film of lead zirconate titanate with a divided electrode configuration. In-plane actuation is demonstrated practically, and excellent agreement is obtained between theoretically predicted and experimentally measured resonant amplitudes, for the fundamental out-of-plane and in-plane modes of vibration of the fabricated test cantilevers.
URI: http://dx.doi.org/10.1063/1.2805070
Appears in Collections:Staff publications - School of Applied Sciences

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