In-plane excitation of thin silicon cantilevers using piezoelectric thin films
Date published
2007-10
Free to read from
Supervisor/s
Journal Title
Journal ISSN
Volume Title
Publisher
American Institute of Physics
Department
Type
Article
ISSN
0003-6951
Format
Citation
Glenn J.T. Leighton, Paul B. Kirby, Colin H.J. Fox, In-plane excitation of thin silicon cantilevers using piezoelectric thin films, Applied Physics Letters, October 2007, Volume 91, Issue 18, 183510-183510-3
Abstract
This paper deals with the actuation of in-plane and out-of-plane motions of silicon cantilevers, using a single thin film of lead zirconate titanate with a divided electrode configuration. In-plane actuation is demonstrated practically, and excellent agreement is obtained between theoretically predicted and experimentally measured resonant amplitudes, for the fundamental out-of-plane and in-plane modes of vibration of the fabricated test cantilevers.