Design study of piezoelectric micro-machined mechanically coupled cantilever filters using a combined finite element and microwave circuit analysis.

Date published

2006-02-01T00:00:00Z

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Elsevier Science B.V., Amsterdam.

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Article

ISSN

0924-4247

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Citation

Meiling Zhu, Paul B. Kirby, Design study of piezoelectric micro-machined mechanically coupled cantilever filters using a combined finite element and microwave circuit analysis, Sensors and Actuators A: Physical, Volume 126, Issue 2, 14 February 2006, Pages 417-424.

Abstract

A new mechanical filter structure is presented which comprises two silicon cantilevers mechanically coupled by a silicon linkage with thin film piezoelectric transducers providing electrical input and output signals. The resonance behaviour of such a structure results in a band-pass filter response, having a band-width determined by the frequency separation between the closely spaced in-phase and out-of-phase vibrational modes of the two coupled cantilevers. A detailed configuration design analysis, filter simulation and optimisation of performance is undertaken using a new modelling approach combining microwave circuit theory and finite element analysis to evaluate the generalised (A, B, C and D) and scattering (S) circuit parameters of the filter. Two significant features of the filters have emerged from the derived analyses and simulations: (1) with correct design filter Q-values can reach several thousand which is much higher than the Q-values (80) of uncoupled cantilevers, (2) the Q-value is determined by the configuration of the silicon linkage and so is under the designer's control. The position and length of the linkage that give optimum Q and minimum insertion loss are determined.

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Github

Keywords

Coupled cantilevers, piezoelectric mechanical filters, microwave circuit, FEA

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