Gkotsis, P.; Kirby, Paul B.; Saharil, F.; Oberhammer, J.; Stemme, G.
(American Institute of Physics, 2007-10)
A key issue for the design and reliability of microdevices is process related; residual stresses in the thin films from which they are composed, especially for sol-gel deposited Pb(Zrx,Ti1-x)O3 ceramics, where use of Pt ...