Micro electromechanical systems (MEMS) are finding uses in an increasing number of diverse applications. Currently the fabrication techniques used to produce such MEMS devices are primarily based on 2-D processing of thin ...

Thickness mode piezoelectric micro-electromechanical system (MEMS) ultrasound transducers, operating in the 50–75 MHz range, have been fabricated using a composite sol gel technique in combination with wet etching. The ...