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Patterned crack-free PZT thick films for micro-electromechanical system applications
Dauchy, Florent
;
Dorey, Robert A.
(
Springer Science Business Media
,
2007-05-01
)
New Advances in Forming Functional Ceramics for Micro Devices
Dorey, Robert A.
;
Rocks, Sophie A.
;
Dauchy, Florent
;
Navarro, A.
(
2006-10-10
)
Ultra-precision grinding of PZT ceramics--Surface integrity control and tooling design
Arai, S.
;
Wilson, Stephen A.
;
Corbett, John
;
Whatmore, Roger W.
(
Elsevier
,
2009-10
)
Pyroelectric arrays using ceramics and thin films integrated radiation collectors: design fabrication and testing
Whatmore, Roger W.
;
Landi, Spartaco
;
Shaw, Christopher P.
;
Kirby, Paul B.
(
Taylor and Francis
,
2005-07
)
Fabrication of PZT actuated cantilevers on silicon-on-insulator wafers for a RF microswitch.
Jiang, Hong Wen
;
Kirby, Paul B.
;
Zhang, Qi
(
International Society for Optical Engineering - SPIE
,
2003
)
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Author
Dauchy, Florent (2)
Dorey, Robert A. (2)
Kirby, Paul B. (2)
Whatmore, Roger W. (2)
Arai, S. (1)
Corbett, John (1)
Jiang, Hong Wen (1)
Landi, Spartaco (1)
Navarro, A. (1)
Rocks, Sophie A. (1)
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Subject
MEMS (5)
PZT (2)
Acceptance (1)
BOE (1)
cantilever (1)
DRIE (1)
dry etching (1)
Force path (1)
IR detector arrays (1)
Micro-actuator (1)
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Date Issued
2009 (1)
2007 (1)
2006 (1)
2005 (1)
2003 (1)