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|Document Type: ||Postprint|
|Title: ||Comparative Studies of PST Thin Films as Prepared by Sol-Gel, LDCVD and Sputtering Techniques|
|Authors: ||Huang, Zhaorong|
Donohue, P. P.
Anthony, C. J.
Todd, M. A.
Whatmore, Roger W.
|Issue Date: ||2002|
|Citation: ||Z. Huang; P. P. Donohue; Q. Zhang; D. Williams; C. J. Anthony; M. A. Todd; R. W. Whatmore; Comparative Studies of PST Thin Films as Prepared by Sol-Gel, LDCVD and Sputtering Techniques, Integrated Ferroelectrics, Volume 45, Issue 1 2002 , pages 79 - 87|
|Abstract: ||Lead scandium tantalate (PST) thin films for pyroelectric applications have been deposited by using liquid delivery chemical vaporise deposition (LDCVD), sputtering and sol-gel techniques. These films were annealed by using rapid thermal annealing to improve their electrical properties. Their microstructures and electrical properties such as permittivity r , dielectric loss tan , pyroelectric coefficient p, and thermal detection figure of merit F d were studied. It is suggested to use a combination of methods to depositing films and then use rapid thermal annealing to producing high quality PST thin films.|
|Appears in Collections:||Staff publications - School of Applied Sciences|
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