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Please use this identifier to cite or link to this item: http://dspace.lib.cranfield.ac.uk/handle/1826/1760

Document Type: Postprint
Title: Comparative Studies of PST Thin Films as Prepared by Sol-Gel, LDCVD and Sputtering Techniques
Authors: Huang, Zhaorong
Donohue, P. P.
Zhang, Qi
Williams, D.
Anthony, C. J.
Todd, M. A.
Whatmore, Roger W.
Issue Date: 2002
Citation: Z. Huang; P. P. Donohue; Q. Zhang; D. Williams; C. J. Anthony; M. A. Todd; R. W. Whatmore; Comparative Studies of PST Thin Films as Prepared by Sol-Gel, LDCVD and Sputtering Techniques, Integrated Ferroelectrics, Volume 45, Issue 1 2002 , pages 79 - 87
Abstract: Lead scandium tantalate (PST) thin films for pyroelectric applications have been deposited by using liquid delivery chemical vaporise deposition (LDCVD), sputtering and sol-gel techniques. These films were annealed by using rapid thermal annealing to improve their electrical properties. Their microstructures and electrical properties such as permittivity r , dielectric loss tan , pyroelectric coefficient p, and thermal detection figure of merit F d were studied. It is suggested to use a combination of methods to depositing films and then use rapid thermal annealing to producing high quality PST thin films.
URI: http://hdl.handle.net/1826/1760
Appears in Collections:Staff publications - School of Applied Sciences

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