dc.contributor.author | Zhou, Hui | |
dc.contributor.author | Bennett, Adam | |
dc.contributor.author | Castelli, Marco | |
dc.contributor.author | Jourdain, Renaud | |
dc.contributor.author | Guo, Jiang | |
dc.contributor.author | Yu, Nan | |
dc.date.accessioned | 2021-01-22T15:34:44Z | |
dc.date.available | 2021-01-22T15:34:44Z | |
dc.date.issued | 2020-09-02 | |
dc.identifier.citation | Zhou H, Bennett A, Castelli M, et al., (2020) Design of a motorised plasma delivery system for ultra-precision large optical fabrication. International Journal of Extreme Manufacturing, Volume 2, Issue 4, 2020, Article number 045301 | en_UK |
dc.identifier.issn | 2631-8644 | |
dc.identifier.uri | https://doi.org/10.1088/2631-7990/abab49 | |
dc.identifier.uri | https://dspace.lib.cranfield.ac.uk/handle/1826/16235 | |
dc.description.abstract | A unique plasma figuring (PF) process was created and demonstrated at Cranfield University for manufacturing extremely large telescopes. The atmospheric pressure processing is faster and more cost-effective than other finishing processes; thus, providing an important alternative for large optical surfaces. The industrial scale manufacturing of thousands of ultra-precision metre-scale optics requires a robust PF machine: this requirement is achieved by making the plasma delivery system (PDS) performance repeatable. In this study, a dedicated PDS for large optical manufacturing was proposed to meet the industrial requirement. The PDS is based on an L-type radiofrequency (RF) network, a power supply, and an inductively coupled plasma torch. However, the complexities of these technologies require an in depth understanding of the integrated components that from the PDS. A smart control system for the modified PDS was created. This novel control system aims to make the characterization process deterministic: by automating the tuning of critical electrical components in the RF network, which is achieved by the use of in-line metrology. This paper describes the main design aspects. The PDS was tested with a good correlation between capacitance and RF frequencies. The robust PDS design enables a stable discharge of plasma with a low deviation of RF signals during the total 15 hours' tes | en_UK |
dc.language.iso | en | en_UK |
dc.publisher | IOP | en_UK |
dc.rights | Attribution 3.0 International | * |
dc.rights.uri | http://creativecommons.org/licenses/by/3.0/ | * |
dc.subject | plasma delivery system | en_UK |
dc.subject | RF network | en_UK |
dc.subject | inductively coupled plasma | en_UK |
dc.subject | plasma figuring | en_UK |
dc.title | Design of a motorised plasma delivery system for ultra-precision large optical fabrication | en_UK |
dc.type | Article | en_UK |
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