Citation:
Dunn S, Whatmore RW. (2001) Transformation dependence of lead zirconate titanate (PZT) as shown by PiezoAFM surface mapping of Sol-gel produced PZT on various substrates. Integrated Ferroelectrics, Volume 38, Issue 1-4 pp. 39-47
Abstract:
PZT was grown on STP (Si/SiO2/Ti/Pt (Ti 5nm, Pt 100nm)), SAP (Si/Si3N4/Al/Ti/Pt
(Al 100nm, Ti 10nm, Pt 15nm)) and GI (Glass/ITO(Indium Tin Oxide)). In each
case the PZT underwent the same heat treatment, 200ºC for 2 minutes and then
530ºC for 5 minutes. The extent of perovskite formation was evaluated using
Piezoresponse force microscopy (PFM). This provided information about the
domain orientation and spatial distribution of ferroelectric material in the PZT film.
This showed that PZT/STP underwent complete transformation to the perovskite
phase. However, for the PZT/SAP and GI incomplete transformation to the
perovskite occurred. A system of rosettes surrounded by an amorphous matrix
developed. The size and density of the PZT rosettes on the surface was found to
be substrate dependent. For Gi/PZT the density of rosettes formation is ca. 1/μm2,
compared to 4/μm2 for PZT/SAP. The rosettes for the PZT on GI grow a maximum
size of 2μm, which compares to 1μm for PZT on SAP. Differences in the observed
growth rate and nucleation density are associated with the back electrode stability
and crystal structure, effects that will be discussed in this paper.
