Correlation and convolution filtering and image processing for pitch evaluation of 2D micro- and nano-scale gratings and lattices

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dc.contributor.author Chen, Xiaomei
dc.contributor.author Koenders, Ludger
dc.contributor.author Parkinson, Simon
dc.date.accessioned 2017-03-28T09:50:46Z
dc.date.available 2017-03-28T09:50:46Z
dc.date.issued 2017-03-14
dc.identifier.citation Xiaomei Chen, Ludger Koenders, and Simon Parkinson. Correlation and convolution filtering and image processing for pitch evaluation of 2D micro- and nano-scale gratings and lattices. Applied Optics, 2017, Volume 56, Issue 9, pp2434-2443 en_UK
dc.identifier.issn 1559-128X
dc.identifier.issn http://dx.doi.org/10.1364/AO.56.002434
dc.identifier.uri https://dspace.lib.cranfield.ac.uk/handle/1826/11669
dc.description.abstract We have mathematically explicated and experimentally demonstrated how a correlation and convolution filter can dramatically suppress the noise that coexists with the scanned topographic signals of 2D gratings and lattices with 2-dimensional (2D) perspectives. To realize pitch evaluation, the true peaks’ coordinates have been precisely acquired after detecting the local maxima from the filtered signal, followed by image processing. The combination of 2D filtering, local-maxima detecting and image processing make up the pitch detection (PD) method. It is elucidated that the pitch average, uniformity, rotation angle and orthogonal angle can be calculated using the PDmethod. This has been applied to the pitch evaluation of several 2D gratings and lattices, and the results are compared with the results of using the CG- and FT-method. The differences of pitch averages which are produced using the PD-, CG- and FT-methods are within 1.5 pixels. Moreover, the PD-method has also been applied to detect the dense peaks of Si (111) 7×7 surface and the HOPG basal plane. en_UK
dc.language.iso en en_UK
dc.publisher Optical Society of America en_UK
dc.rights © 2017 Optical Society of America. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modifications of the content of this paper are prohibited.
dc.rights Attribution-NonCommercial 4.0 International
dc.rights.uri http://creativecommons.org/licenses/by-nc/4.0/
dc.subject Instrumentation en_UK
dc.subject measurement en_UK
dc.subject metrology en_UK
dc.subject Imaging processing en_UK
dc.subject Spatial filtering en_UK
dc.subject Microscopy en_UK
dc.title Correlation and convolution filtering and image processing for pitch evaluation of 2D micro- and nano-scale gratings and lattices en_UK
dc.type Article en_UK


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© 2017 Optical Society of America. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modifications of the content of this paper are prohibited. Except where otherwise noted, this item's license is described as © 2017 Optical Society of America. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modifications of the content of this paper are prohibited.

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